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德國SUSS勻膠機/熱板/顯影機
- 品牌：德國suss
- 型號： LabSpin6/LabSpin8
- 產地：歐洲 德國
- 供應商報價：面議
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香港壘為信息科技實業有限公司
更新時間：2020-10-26 11:04:52 -
銷售范圍售全國
入駐年限第6年
營業執照已審核
- 同類產品半導體參數分析儀(16件)
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聯系方式：400-822-6768
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詳細介紹
Substrates
? LabSpin 6: up to 150mm round or 100mm square substrates? LabSpin 8: up to 200mm round or 150mm square substrates
Motor
? Brushless E-motor with collection glass beaker? Spin speed: min 50 rpm
max 8000 rpm (with 200mm chuck)
? Acceleration: max 3000 rpm/s
Controller
? Graphical User Interface: Touch panel with color display? Number programmable recipes: max 200
? Step number per recipe: max 40
? Loop function: repeats a set of process stepCoater Options
? Cover plate for additional functions
? Resist dispense systems
Pressurized syringe dispense
Full automatic dispense system
? Edge Bead Removal (EBR)
Developer Options
? Cover plate for additional functions? Developer dispense option
? DI-water dispense option
? Nitrogen Drying option
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